Towards a deeper understanding of plastic deformation in mono-crystalline silicon

This paper investigates the plastic deformation in mono-crystalline silicon under complex loading conditions. With the aid of various characterization techniques, it was found that the mechanism of plasticity in silicon is complex and depends on loading conditions, involving dislocations, phase transformations and chemical reactions. In general, plastic deformation in silicon is the coupled result of mechanical deformation controlled by the stress 3eld applied, chemical reaction determined by the external loading environment, and mechanical–chemical interaction governed by both the loading type and environment. Temperature rise accelerates the penetration of oxygen into silicon and reduces the critical stress of plastic yielding. When the chemical e4ect is avoided, the initiation of plasticity is enabled by octahedral shear stress but the further development of plastic deformation is in5uenced by hydrostatic stress. Plasticity of silicon in the form of phase transformations, e.g., from the diamond to amorphous or from the amorphous to bcc structures, is determined by loading history. ? 2001 Elsevier Science Ltd. All rights reserved.